Novellus Systems has reached a new milestone for its VECTOR Extreme plasma-enhanced chemical vapour deposition (PECVD) system, with the company shipping its 100th system. The VECTOR Extreme was introduced in July of 2007.
The VECTOR Extreme is a 300mm platform specifically designed to meet the needs of memory “mega-fabs,” defined as semiconductor manufacturing facilities with production outputs typically in excess of 100,000 wafers per month.
“Achievement of this milestone was only possible because VECTOR Extreme addresses a critical need of memory manufacturers, the need to lower cost,” noted Sesha Varadarajan, senior vice president of Novellus’ PECVD business unit. “Leveraging the inherent advantages of Novellus’ multi-station sequential processing architecture, VECTOR Extreme delivers the highest wafer output per unit area, resulting in the lowest cost of ownership relative to competing products.”