Online information source for semiconductor professionals
Order Focus: Levitech sells RTP system to European foundry
Popular articles
â??Velocityâ?? the new buzzword in Intelâ??s PQS annual awards - 12 April 2012
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011
Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
A leading IC logic foundry in Europe has placed a follow-on order with ASM International spin-off, Levitech. The order is for its novel Levitor 4300 Rapid Thermal Processing (RTP) system, which will be used for 45nm and below silicide film processing, according to the company. “The formation of advanced silicide films poses major challenges as devices integration moves beyond the 45nm technology node”, commented Jaap Beijersbergen, CEO of Levitech. “This order once again confirms the Levitor high productivity and unparalleled process performance on advanced silicide films.”