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Order Focus: Levitech sells RTP system to European foundry

13 January 2011 | By Mark Osborne | News > Wafer Processing

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Levitor 4300 Rapid Thermal Processing (RTP) systemA leading IC logic foundry in Europe has placed a follow-on order with ASM International spin-off, Levitech. The order is for its novel Levitor 4300 Rapid Thermal Processing (RTP) system, which will be used for 45nm and below silicide film processing, according to the company.

“The formation of advanced silicide films poses major challenges as devices integration moves beyond the 45nm technology node”, commented Jaap Beijersbergen, CEO of Levitech. “This order once again confirms the Levitor high productivity and unparalleled process performance on advanced silicide films.”

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