Online information source for semiconductor professionals
Milestone: Novellus ships 100th 300mm tool to Southeast Asia
Popular articles
Voltaix names Peter Smith as CEO - 09 November 2011
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Novellus Systems has reached the 100th shipped 300mm tool to
Southeast Asia with the successful qualification of a ‘VECTOR Express’
plasma-enhanced chemical vapor deposition (PECVD) system at TECH
Semiconductor’s 300mm DRAM fab in Singapore, the company said.
"The unparalleled productivity demonstrated by VECTOR Express has helped TECH Semiconductor continuously drive down cost of ownership in the challenging DRAM marketplace," said Andrew Goh, President of Novellus' Southeast Asia operations. "TECH is pleased with Novellus' responsiveness and our commitment to improve productivity for a variety of applications, including AHM, TEOS, SiN and SiON films."