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Milestone: Applied Materials ships 200th Producer APF CVD system
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Applied Materials has made its 200th Applied Producer APF CVD system
shipment, a tool that uses a self-aligned double patterning (SADP)
process to extend optical lithography to 45nm and beyond. According to
Applied Materials, the Producer APF has become the CVD patterning tool
of record at advanced logic, DRAM and flash manufacturers worldwide.
“The Producer APF system has been one of our most successful products, achieving exponential growth as customers adopted it into volume production for an increasing number of device layers,” said Derek Witty, General Manager of Applied’s blanket dielectric films division. “Customers continue to expand their use of our APF family of films as a critical lithography-enabling solution for device scaling in both front and back-end applications. In addition, the Producer GT platform enables a 100 percent improvement in APF productivity, thus significantly reducing cost of ownership.”