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Metrology market consolidation marches on

01 April 2009 | By Mark Osborne | News > Wafer Processing

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KLA-Tencor may get the credit for being the most active acquirer of metrology/inspection tool companies in recent years but is now not alone in the quest to further the consolidation that is needed. Semilab is now hot on heels of KLA-Tencor in that respect with a recent spate of acquisitions and news that it has now acquired both Advanced Metrology Systems (AMS) and QC Solutions. The company did not disclose financial details, except that the deals were cash transactions.

In 2008 the company purchased the assets of SOPRA SA, SSM and Boxes Cross implant and metal thickness metrology technology from Applied Materials. In the new round of acquisitions, AMS sticks out, known for its specialized almost custom metrology solutions for leading-edge semiconductor characterization work. QC Solutions offers non-contact measurement technology, known for epitaxial and implanted silicon wafer analysis.

“With these acquisitions, we are expanding our ability to provide a full set of metrology solutions to support basic material characterization in everything from R&D settings to fully automated production lines,” commented Dr. Tibor Pavelka, founder, President and Chief Executive Officer of Semilab. “Semilab receives the benefit of their technologies and intellectual property and we can combine product lines to better meet the needs of our customers. We believe investing in the semiconductor market, even in these tough times will enable us to continue our nearly 20 years of growth and profitability and meet the metrology needs of the market presented by the drive to smaller nodes and new materials.”

AMS and QC Solutions will now become part of a Massachusetts division of Semilab known as Semilab AMS. Heading this division will be Chris Moore, former CEO of AMS and a veteran of the semiconductor and metrology market, appointed as President and CEO of Semilab AMS.

“Semilab and AMS are well matched in terms of products and approach to customer engagement,” noted Moore. “AMS’s success has come from delivering not products, but solutions designed to solve customer’s specific metrology challenges. I look forward to extending our success as part of Semilab and continuing to grow Semilab’s leadership in materials metrology.”

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