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ISMI to use CDE’s four-point probe tool for 450mm wafer program
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The 450mm wafer program at International SEMATECH Manufacturing Initiative (ISMI) is to use Creative Design Engineering’s (CDE) ResMap 575 metrology tool for four-point probe resistivity mapping. The system will be used for bulk silicon and conductive film development efforts, CDE said.
“CDE’s four-point probe tool will be an important step forward in providing metrology capabilities for suppliers in their 450mm tool and process development efforts,” said Tom Abell, ISMI’s 450mm Senior Advisor and Test Wafer Generation Project Manager. “We are very pleased that CDE will be participating in our program and in our supplier enabling role for a cost-effective transition.”