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Imec and Coventor team on CMOS integrated MEMS

01 February 2011 | By Mark Osborne | News > Wafer Processing

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Imec and Coventor are partnering to improve and expand the use of advanced design and manufacturing techniques for the development of CMOS integrated MEMS. The partnership includes strategic alignment on R&D roadmaps and collaboration on advanced research topics.

“More and more product developers from a wide range of industries look to integrate MEMS because of their powerful capabilities. Imec is well-positioned to address this market through its CMORE initiative which seeks to expand the scaling of CMOS micro- and nano-devices by adding functions other than logic and memory to chips,” commented Rudi Cartuyvels, Vice President Process Technology at imec. “By partnering with Coventor, we gain access to years of production experience and technology for MEMS design, and a breadth of expertise in developing a larger ecosystem for MEMS developers.”

Coventor will collaborate on expanding imec’s use of Coventor’s software tools suite for MEMS + IC design. They will jointly develop process design kits (PDKs) for imec’s SiGe MEMS-above-IC process.

Together we can develop more efficient and practical approaches to MEMS development that meet the demanding requirements of markets and applications that have yet to leverage the vast potential of MEMS,” said Mike Jamiolkowski, CEO of Coventor.

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