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Globalfoundries joins imec’s sub-22nm core CMOS program: EUV lithography included
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Globalfoundries is partnering on sub-22nm CMOS scaling and GaN-on-Si technology with the nanoelectronics R&D center, imec. The foundry will join imec’s sub-22nm core CMOS program, which encompasses material and device studies, tool and process step exploration, integration options and advanced characterization. Globalfoundries will also collaborate on EUV lithography.“Globalfoundries has long embraced a collaborative approach to R&D innovation based on a model of shared objectives and shared investments with partners around the world,” said David Bennett, vice president of alliances at Globalfoundries. “The mission and capabilities of imec are highly complementary to our current collaborative R&D approach and will add another important dimension to our technology pipeline.”
The foundry will also join the imec GaN research program, which aims at high-performance, cost-effective GaN devices on 200mm silicon wafer.