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First Nano ships SiGe Nanowire System to CEA, France

03 June 2008 | By Síle Mc Mahon | News > Wafer Processing

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First NanoFirst Nano has shipped one of its SiGe CVD systems to CEA Grenoble, France. The CEA will use the system in its Silicon Nanoelectronics Photonics and Structures (SiNaPs) laboratory for aiding research into low-dimensional silicon-based nanostructures.

The EasyTube 3000 (pictured), Easy Gas and Easy Exhaust systems were specially configured for SiGe nanowires, and will allow the SiNaPs engineers and scientists to continue their research into nanowires with the Laboratorie des Technologies de la Microelectronique (LTM) and the Centre National de la Recherche Scientifique (CNRS), who co-funded the purchase.

"The purchase of the EasyTube3000 will enlarge the spectrum of our research with the growth of heterostructured nanowires, their doping, and with the possibility to extend the growth to a wide variety of other materials thanks to the liquid precursor kits,” said Pascal Gentile, a CEA engineer. “Our projects cover fundamental aspects (growth, carrier transport ... ) as well as potential applications (Nano Electronics, Solar Energy, Nanophotonics, MEMS and Sensors.”

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