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Cymer suffers same ill as ASML as capex pause to hit shipments

25 July 2011 | By Mark Osborne | News > Lithography

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DUV light source orders have waned in the second quarter as IC manufacturers pause on capital expenditure plans going into 2011, according to comments made by Cymer in reporting quarterly results last week. Light source shipments in 2Q, totalled 47 light sources, of which 28 were ArF immersion, 17 were KrF and 2 were ArF dry, and the company installed 56 light sources at chipmaker and other end user locations.

However, Cymer’s management noted that shipments are expected to be significantly below the number of DUV light sources shipped in the last quarter.

"The lower level of second quarter DUV light source orders is reflective of chipmakers recently assessing their capital investments,” noted Bob Akins, Cymer's chief executive officer. “As a result, we expect to ship a significantly reduced number of DUV light sources in the third quarter.  Our investment in advanced performance enhancements for our flexible power DUV light sources and our focus on product reliability continues to strengthen our competitive position.  Therefore, we believe when light source demand improves we will continue to be very well positioned to support customer equipment investment.  We anticipate that our Installed Base Products revenue will remain strong, primarily driven by installed base growth, pulse mix and initial expansion to EUV and TCZ products. In spite of slowing DUV demand, we are committed to EUV source development and commercialization as we believe that our LPP EUV source technology is the most viable path towards enabling the extension of Moore's Law.  Customer pull for EUV and TCZ products is a significant driver of future growth for the company."

Athin’s also noted that, “We continued to increase our investment in extreme ultraviolet (EUV) and we recently completed the installation of our second EUV 3100 source at an additional chipmaker location.”

Cymer reported 2Q revenue of US$158.2 million compared to revenue of US$131.9 million in the second quarter of 2010, and revenue of US$154.4 million in the first quarter of 2011.

The light source manufacturer guided revenue to be approximately US$130 million for Q3.

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