Online information source for semiconductor professionals

Carl Zeiss ships first production ready EUV lithography optics system to ASML

16 September 2009 | By Mark Osborne | News > Lithography

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

After approximately 15 years in the making, Carl Zeiss has said that the first Extreme Ultraviolet Lithography (EUVL) optics system designed for volume production has now been shipped to ASML. The first wave of production EUV tools are expected to be shipped by ASML in the second half of 2010 and will have 60 wafers per hour throughput, according to the company.

Zeiss noted that it had invested more than €100 million in the optical systems required for EUV lithography. ASML has already received five orders for the EUVL production system, with deliveries starting in 2010.

“Fifteen years ago, we launched research and development of EUV Lithography and have invested far in excess of 100 million Euros since then,” noted Dr. Peter Kürz, EUV Program Director at Carl Zeiss SMT in Oberkochen. “To date, ASML has installed two process development tools around the globe. Now its use in the volume production of microchips is within reach.”


Related articles

Tool Order: Samsung Electronics purchases photomask metrology tool from Carl Zeiss SMT - 08 January 2009

Carl Zeiss invests in 3D laser lithography start-up - 02 October 2008

Carl Zeiss SMT buys Israeli mask metrology company - 06 August 2008

Tool Order: Nuflare selects photomask metrology system from Carl Zeiss - 03 December 2008

New Product: Carl Zeiss SMT‚??s Starlith 1900i pushes limits of catadioptric lenses - 25 September 2006

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: