Online information source for semiconductor professionals

Axcelis to offer sales and support to Ion Beam Services plasma immersion implant tools

06 August 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Although Plasma immersion ion implantation (PIII) is regarded as a niche application used primarily for the formation of shallow junctions, trench doping and conformal deposition, amongst others, the market is mainly served by Varian Semiconductor for production applications. Axcelis Technologies has said that it has now teamed with Ion Beam Services (IBS), based in France, to provide sales and support for the PULSION plasma immersion ion implanter. The system is configured for R&D and another system for production applications.

“The PULSION plasma immersion technology offers memory and logic chipmakers compelling cost and performance advantages for ultra high dose applications than what are currently available on the market today," commented Mary Puma, Axcelis Chairman and CEO "This agreement allows Axcelis to provide customers with a broader portfolio of products to meet requirements driven by the ITRS roadmap for decreasing device geometries as well as the emergence of novel transistor structures."

The PULSION system is claimed to achieve high process stability at ultra low energy while offering high dose process versatility at both 200 and 300mm wafer processing. 

Related articles

Plasma immersion implant business worth US$66 million in 2008 - 10 August 2009

Axcelis rejects second offer from Sumitomo - 17 March 2008

Axcelis taps Applied Materials to service equipment in Japan - 22 June 2009

Tool Order: Logic and memory manufacturers select Optima HDx high current implanter from Axcelis - 20 January 2010

Axcelis sells SEN share to Sumitomo Heavy Industries for US$132 million - 26 February 2009

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: