ATMI has said that its 'iCleaner' product is the first chemistry in the semiconductor industry to receive the US Environmental Protection Agency’s (EPA) 'Design for the Environment' label. For this product, ATMI partnered with a customer to deliver cleaning solutions used in the semiconductor fabrication process. With the aid of ATMI's High Productivity Development tools and the '12 Principles' approaches, the team developed a novel, low odor, and environmentally benign formulation that delivers a time- and cost-effective in-line cleaning method.
"Our High Productivity Development capabilities continue to enable breakthrough solutions quickly for our partners and customers," noted Tod Higinbotham, ATMI's executive vice president and general manager of Microelectronics. "We're pleased to be able to collaborate in this way to meet our customer's goals efficiently. Meeting the EPA requirements for the DfE designation is certainly another first and positive step forward in chemistry and materials development."
In addition to the safety and environmental aspects, ATMI claimed that the product offered improved cleaning performance that compared favourably to the previous method with both increased tool throughput and no added defects.