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ATMI and SAFC Hitech team up to market solid source vaporizer technology

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ATMI implant toolAnnouncing their plans to co-market the former’s ProE-Vap system, ATMI and SAFC Hitech have partnered up at this year’s Semicon West event, which is currently underway, and will sign a definitive agreement stating their partnership in both the semiconductor and compound semiconductor sectors in the near future. The system, a solid-source vaporizer designed for ALD processes, is used for volume production of high-k/metal gate applications.

"The ProE-Vap system removes a significant barrier to achieving successful ALD applications processes and overcoming manufacturing process challenges," said Tod Higinbotham, Executive Vice  President, Process Solutions of ATMI. "In partnering with Sigma Aldrich, we will bring ProE-Vap technology benefits to a broader customer base and alleviate any single-source supply chain concerns."

The partnership will see both SAFC Hitech and ATMI offer the ProE-Vap systems to the semiconductor market, while SAFC will oversee the product’s marketing in the global compound semiconductor market.

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