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ASM teams with Air Liquide on high-k films

10 December 2009 | By Mark Osborne | News > Materials and Gases

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ASM International has signed a license and preferred supplier agreement for Air Liquide’s ‘ALOHA’ range of high-k precursors used in ALD processing. Air Liquide will also gain access to ASM's ALD processes and material intellectual property related to the deposition of advanced ultra-high-k insulator films such as Yttrium-doped Zirconia, STO and BST.

"It is essential that the whole supply chain, including chemicals, their transportation and storage, deposition equipment and source containers reaches maturity before new materials will be adopted by our customers,” commented Ivo Raaijmakers, Chief Technology Officer of ASM. “The agreement with Air Liquide is a key step to enable ultra high-k materials for the industry."

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