Online information source for semiconductor professionals

ASM International adds Taiwan foundry to Intel-included list of high-k ALD users

28 April 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

An unidentified Taiwanese foundry has selected ASM International’s ‘Pulsar’ atomic layer deposition (ALD) tool for the deposition of high-k gate dielectric materials at the 28nm production node. ASM was an early pioneer of ALD process technology and was selected by Intel for its 45nm high-k materials and deposition tools, early in the development phase.

"Achieving a successful high-k manufacturing process for the 28 nm node is a testament to ASM's ability to integrate new materials into manufacturing," said Glen Wilk, business unit manager for transistor products at ASM. "Having qualified our high-k process demonstrates its readiness for manufacturing at the 28 nm node, and we look forward to advanced developments that extend those same benefits to future nodes."

According to ASM, the unidentified foundry, which is either TSMC or UMC, will also collaborate with the Dutch equipment supplier on process development, supplying Pulsar ALD tools this quarter for future development. Apparently, the foundry in question has spent the last four years collaborating with ASM on hafnium-based high-k materials.


Related articles

SMIC to spin off package and test units and expand solar operations in Shanghai - 19 March 2009

Intel follows TEL in acquiring shares in ASM International - 05 May 2009

Intel plans further headcount reductions - 17 October 2007

Intel Ireland employees safe despite JV Flash venture - 23 May 2007

Marvell‚??s foundry move spells end of Intel‚??s Colorado fab - 29 June 2007

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: