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API Nanotronics completes deep-UV lithography polarizer development deal
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API Nanotronics has completed a development agreement with an unnamed leading semiconductor capital equipment company to develop proprietary high-performance deep-ultraviolet (DUV) polarizers for next-generation lithography equipment.
The proprietary deep-UV optical nanoproducts are manufactured at the company's 20,000 square-foot nanofabrication and MEMS facility, NanoOpto, in Somerset, NJ, which includes one of the world's largest multiwafer atomic layer deposition (ALD) production capabilities, according to API.
"The future of semiconductor fabrication lies in the deep UV," said nanotechnology expert Martin Moskovits, API's CTO. "We believe that API's nanograting-based optical technology is the best available technology to manage UV over the large areas required to process large wafers."