Online information source for semiconductor professionals

Aixtron, Ovonyx team on AVD processes for phase-change memory

20 January 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

AIXTRON and Ovonyx team on AVD processes for Phase Change MemoryUsing Aixtron's atomic vapor deposition technology, which features the pulsed injection of liquid precursors for precise deposition, Aixtron and Ovonyx plan to develop the second-generation deposition technology required for the scaling of phase-change memory (PCM). According to the companies, physical vapor deposition (PVD) processes will be used for the initial production ramp of PSM devices.

"PCM is on the verge of commercial adoption using conventional sputter physical vapor deposition techniques, however, it is clear that subsequent generation PCM cells would significantly benefit from atomic vapor deposition of phase-change materials to further increase scalability and accelerate cost reductions," said Dr. Bernd Schulte, executive vice president and chief operating officer of Aixtron. "We believe that, working with Ovonyx, we can accelerate commercialization of AVD phase-change material deposition into high-volume production and offer chip manufacturers higher productivity and low cost of ownership solution."

Related articles

Synopsys and Ovonyx to work on phase change memory device simulation models - 11 September 2008

ATMI teams with Ovonyx on Phase Change Memory precursor materials - 24 March 2008

Phase Change Memory deal struck between Ovonyx and Numonyx - 23 April 2009

Tool Order: Korean DRAM manufacturer selects Aixtron‚??s ALD tool - 16 June 2010

AIXTRON expands its Edwards exhaust treatment system - 02 December 2008

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: