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STMicroelectronics has placed a multi-million euro order with EV Group for a number of tools required for processing 300mm wafers for through-silicon-via (TSV) applications. The tools have been supplied and installed at STMicroelectronics’ Crolles2 pilot line in Crolles, France. The tools include EVG’s EVG150 Coater and EVG150 Developer and its new NanoSpray photoresist coating processing capabilities for steep topographies as part of its IQ Aligner. Read more >>

Eco-Snow Systems, an affiliate of The Linde Group, has announced the installation of two of its cleaning systems at two U.S.-based MEMS manufacturers. The Eco-Snow VersaClean system, used for cleaning of packaging components, and the Eco-Snow WaferClean system for released device level cleaning prior to wafer dicing, were recently installed at the two unnamed MEMS companies. Read more >>

Rohm and Haas Electronic Materials has announced the opening on June 26th of its new $60 million immersion lithography facility in Marlborough, MA. The facility, which is fully equipped and has begun processing wafers, was established to support the company’s R&D in the area of advanced 193nm lithography materials for semiconductor applications. Read more >>

Cymer has signed a multi-year unit agreement with Toshiba that includes purchasing and support for krypton fluoride (KrF) and argon fluoride (ArF) light sources in Toshiba's future 300mm investment plans. Read more >>

A groundbreaking ceremony for the new Applied Materials Operations Center at Changi North Industrial Park in Singapore took place earlier today, and saw the attendance of several Applied Materials executives, including Mike Splinter (pictured), company President and CEO. Chairman of the Singapore Economic Development Board Lim Siong Guan and U.S. Ambassador Patricia Herbold were also present for the ceremony. Read more >>

HamaTech Advanced Process Equipment (HamaTech APE) has said it has reached a new milestone for its 45nm capable MaskTrack photomask cleaning system with the shipment of its 30th tool. Read more >>

Evonik Industries AG and BASF have announced a joint development program for next-generation CMP slurries, targeting shallow trench isolation (STI) and inter-layer dielectric (ILD) processes. Evonik is to provide various grades of cerium oxide to be used with BASF’s slurry chemistry. Read more >>

Mattson Technology has purchased a SEM MC600i failure analysis tool from Sela for use in process fine-tuning and customer sampling purposes. The MC600i was delivered and installed at Mattson in the first quarter of 2008, the company said. 

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Texas Instruments has been recognized by the U.S. EPA for accomplishments in improving air quality and reducing greenhouse gas emissions. There were 11 winners of EPA’s Clean Air Excellence Awards, which included TI. Read more >>

A Japanese-based IC manufacturer has purchased a Suprema photoresist strip system from Mattson Technology. According to Mattson, the order comes from a new account and extends its installed base of Suprema systems and increases its share of the photoresist strip market. Read more >>