Axcelis Technologies’ Board of Directors has rejected the $6.00 per
share offer for the company by Sumitomo Heavy Industries. Axcelis cited
the continued under-valuation such an offer makes when considering
Axcelis’s business potential with its suite of Optima implant tools and
the value in SEN, the joint venture implant business between Axcelis
and SHI, the Axcelis board said in a statement.
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With the introduction of new advanced materials and processes for
its 45nm technology node migration in 2007, Intel Corporation has
acknowledged some of its suppliers that were critical to its ability to
migrate to the new node within its Preferred Quality Supplier (PQS)
awards for 2007. A total of 35 suppliers were honored.
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Applied Materials retained the top spot of semiconductor equipment
suppliers, according to the 2007 rankings by revenue from VLSI
Research. Tokyo Electron and ASML remained in second and third spots
respectively, the sixth consecutive year all three leading suppliers
retained their positions, according to the market research firm.
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Air Liquide Electronics has cited ‘serious tensions in the supply
chain’ with respect to silane (monosilane, SiH4), forcing the company
to raise prices immediately for silane by 20 percent as contracts
allow. The move comes closely behind Air Liquide’s announcement on the
6th of March, 2008 that it plans to triple silane production.
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In cooperation with a leading Japanese EUV mask supplier, Vistec
Semiconductor noted at the recent European Mask and Lithography
Conference (EMLC) in Dresden, Germany, that it published new
registration metrology results on EUV masks using its LMS IPRO4. The
results showed that measurement repeatability on EUV masks proved to be
better than 0.8nm and accuracy was below 1.6nm (3 sigma) over the
entire active array of 100 x 128mm.
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Novellus Systems has reached the 100th shipped 300mm tool to
Southeast Asia with the successful qualification of a ‘VECTOR Express’
plasma-enhanced chemical vapor deposition (PECVD) system at TECH
Semiconductor’s 300mm DRAM fab in Singapore, the company said.
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Entrepix, Inc. has quadrupled its cleanroom space at its Tempe,
Arizona facility with the addition of a 5,000 square foot facility to
contain the company’s extended equipment and services. Increased demand
for CMP-related services has meant that the company’s current facility
size was unsuitable and merited an expansion.
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Austria-based NanoTecCenter Weiz Forschungsgesellschaft mbH (NTC Weiz)
has placed an order with EV Group for an EVG620 precision alignment
system. NTC Weiz will use the system for its new R&D facility,
which will be focussed on organic/plastic electronic technologies.
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