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TSMC promotes lithography guru to VP of Nano Patterning Division

15 February 2011 | By Mark Osborne | Going Places

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Eminent semiconductor lithography expert, Dr. Burn Lin has been promoted within leading foundry, TSMC. Dr. Lin was Senior Director of the Nano Patterning Division under its R&D organization, has now become its Vice President.

Dr. Lin was a champion of immersion lithography and has been critical of the cost of migrating to EUV. He has been championing the use of e-beam lithography for several years.

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