Dr. Ben Tsai, KLA-Tencor’s Executive Vice President, and CTO has been appointed to serve as a member of Ultratech’s Board of Directors. Ultratech chose Tsai due to his 23 years of experience at KLA-Tencor and is a key member of its executive management team and deep technological insight and a valuable global perspective into future trends.
At KLA-Tencor, Tsai has previously served as group vice president and CTO of systems, and general manager for the Wafer Inspection Division. Prior to the merger between KLA Instruments and Tencor Instruments in 1997, Tsai filled the post of CTO at KLA Instruments as well as numerous executive positions in the company’s Wafer Inspection Division. From 2005 to 2006, Tsai served as senior vice president and executive officer of technology at Tokyo Electron Limited, a leading supplier of semiconductor production equipment. Tsai also currently serves on the board of Varian Semiconductor Equipment Associates, Inc.
Tsai holds more than 30 patents in the areas of inspection and metrology. Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University and a master’s degree and Ph.D. in electrical engineering from the University of Illinois at Urbana-Champaign.