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Tosoh starts thin film sputtering target manufacturing in China

02 August 2011
Tosoh SMD has supplied the China market for over 20-years, but the firm has only now established a thin film sputtering target manufacturing subsidiary in Shanghai, China. Citing the need to better serve its semiconductor, flat-panel display, solar, and large area coating customers in China, Tosoh expects the facility will enable its to grow its business in the region. Read more >>

SEMICON: 3M opens CMP pad plant in Taiwan and expands capacity in Singapore

13 July 2011
3M has completed a major expansion of production capacity at its CMP pad conditioner plant in Woodlands, Singapore, which began earlier this year. To meet demand, 3M has also opened of a new pad conditioner manufacturing plant in YangMei, Taiwan, making the company the only pad conditioner manufacturer with operations in three global locations, which also include the US. Read more >>

Edwards opens vacuum pump manufacturing and technical centre in Korea

30 May 2011
To support business growth and customers in Korea and key parts of Asia, vacuum pump specialist, Edwards has opened a new state-of-the-art manufacturing facility in Korea. Edwards said it had invested approximately US$100 million in the facility, which will also be a key technical centre, allowing more local technical applications support as well as development of product derivatives and the rapid introduction of new products. This is Edwards, seventh manufacturing facility, its first in Korea. Read more >>

Product Briefings

New Product: Crossing Automation enhances Spartan EFEM with 450 wafers per hour (wph) throughput

26 March 2010
Crossing Automation enhances Spartan EFEM with 450 wafers per hour (wph) throughputProduct Briefing Outline: Crossing Automation has announced that it has improved its Spartan equipment front end module (EFEM) performance, enabling it to achieve 450 wafers per hour (wph) throughput. By upgrading Spartan’s production-proven software algorithms for wafer move paths, Crossing Automation now has the highest throughput capability of any commercially available EFEM, while maintaining Spartan’s established reliability and cleanliness performance. Read more >>

New Product: Crossing Automation‚??s ‚??ExpressSolutions‚?? offers OEM’s wafer-level automation

11 June 2009
Product Briefing Outline: ExpressSolutions starts by identifying and understanding a customer’s requirements for a specific process and ends with the implementation of an optimized wafer transfer system. By using Crossing’s modular ‘ExpressConnect’ automation solutions, ExpressSolutions delivers custom configurations that reduce overall cost and time-to-market while maintaining OEM differentiation at the process level. As part of the offering, ExpressSolutions facilitates the design, system integration and documentation of a complete wafer automation platform and its ongoing support. This allows customers to leverage internal engineering resources and achieve reduced acquisition costs, reduced inventory build-up and benefit from low platform support costs. Read more >>

New Product: Crossing Automation takes vacuum wafer handling to next level of standardization

13 March 2009
Crossing Automation’s ‘ExpressConnect’ family of wafer-level automation componentsProduct Briefing Outline: Crossing Automation’s ‘ExpressConnect’ family of wafer-level automation components is designed to provide the industry with a standardized platform that delivers both high-reliability and high-throughput to vacuum wafer handling systems for semiconductor manufacturing. It uses a unique modular solution to wafer-level automation for semiconductor manufacturing that delivers a 20 to 70% smaller footprint; greater flexibility; lower cost; higher productivity; and throughput up to 250 wafers per hour. Read more >>

White Papers

Special valve configurations and evolutions for new ALD precursors

01 March 2008
John Baxter, Swagelok Company, Solon, OH, USA Read more >>

The effect of HCl permeaton through PFA on expected component life

01 March 2008
Don Grant & Debra Carrieri, CT Associated, Inc., Eden Prairie, Minnesota, USA Read more >>

Qualification of components for high purity water, chemical and slurry systems

01 December 2007 | Comments (3)
Gary Van Schooneveld, CT Associates, Inc., Minnesota, USA Read more >>