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News

Varian Vacuum becomes supply chain partner of Carl Zeiss

11 May 2009
Carl Zeiss SMT has designated Varian Vacuum Technologies as a Supply Chain Partner. Varian Vacuum becomes the 7th supply partner, which entails closer collaboration on future technologies required by Carl Zeiss SMT. Varian Vacuum has long supplied vacuum solutions for the electron microscopes of Carl Zeiss. Read more >>

Brooks Instrument acquires Key Instruments

14 April 2009
Key Instruments office in TrevoseBrooks Instrument, a flow measurement and control instrument provider, has acquired Key Instruments, Inc., a company which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters for medical, industrial, water, chemical and laboratory applications.  The Key Instruments name will remain, as well as the facility in Trevose, Pennsylvania.  The deal’s terms were not made public. Read more >>

Ultra Clean shifts more manufacturing to Asia

18 February 2009
Critical subsystems supplier Ultra Clean Holdings is continuing to consolidate manufacturing operations in the U.S. and shift additional manufacturing to Asia to reduce operating costs as its major customers see significant order declines in semiconductor, solar, and flat panel markets. Read more >>

Product Briefings

New Product: Crossing Automation’s ‘ExpressSolutions’ offers OEM’s wafer-level automation

11 June 2009
Product Briefing Outline: ExpressSolutions starts by identifying and understanding a customer’s requirements for a specific process and ends with the implementation of an optimized wafer transfer system. By using Crossing’s modular ‘ExpressConnect’ automation solutions, ExpressSolutions delivers custom configurations that reduce overall cost and time-to-market while maintaining OEM differentiation at the process level. As part of the offering, ExpressSolutions facilitates the design, system integration and documentation of a complete wafer automation platform and its ongoing support. This allows customers to leverage internal engineering resources and achieve reduced acquisition costs, reduced inventory build-up and benefit from low platform support costs. Read more >>

New Product: Crossing Automation takes vacuum wafer handling to next level of standardization

13 March 2009
Crossing Automation’s ‘ExpressConnect’ family of wafer-level automation componentsProduct Briefing Outline: Crossing Automation’s ‘ExpressConnect’ family of wafer-level automation components is designed to provide the industry with a standardized platform that delivers both high-reliability and high-throughput to vacuum wafer handling systems for semiconductor manufacturing. It uses a unique modular solution to wafer-level automation for semiconductor manufacturing that delivers a 20 to 70% smaller footprint; greater flexibility; lower cost; higher productivity; and throughput up to 250 wafers per hour. Read more >>

New Product: ‘Marathon 2 Nano’ platform from Brooks offers OEM tool size reductions

22 January 2009
BrooksProduct Briefing Outline: Brooks Automation has introduced the vacuum process tool automation platform ‘Marathon 2 Nano,’ which is designed to enable smaller footprints for 300mm semiconductor processing equipment. Brooks has included many new features developed from interrelated components that are designed to offer improved process module architecture. Brooks Automation’s Marathon 2 Nano vacuum transfer platform with MagnaTran 9 vacuum robotics and Fusion controls enables a combination of layout flexibility, process module density and overall productivity improvement. Read more >>

White Papers

Special valve configurations and evolutions for new ALD precursors

01 March 2008
John Baxter, Swagelok Company, Solon, OH, USA Read more >>

The effect of HCl permeaton through PFA on expected component life

01 March 2008
Don Grant & Debra Carrieri, CT Associated, Inc., Eden Prairie, Minnesota, USA Read more >>

Qualification of components for high purity water, chemical and slurry systems

01 December 2007 | Comments (3)
Gary Van Schooneveld, CT Associates, Inc., Minnesota, USA Read more >>