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News

AIXTRON expands its Edwards exhaust treatment system

02 December 2008
AIXTRON AG has purchased two GaNcat abatement systems to increase its already instated Edwards exhaust treatment system. The purchase is a noteworthy expansion in AIXTRON’s abatement capacity and will use the GaNcat systems in its R&D laboratory in Aachen, Germany to manage the exhaust generated by the metalorganic chemical vapor deposition (MOCVD) process. Read more >>

Entegris restructures U.S. manufacturing operations

05 November 2008
Gideon Argov, President and Chief Executive Officer EntegrisEntegris said as part of its third quarter financial results that it would be restructuring its two Chaska, Minnesota manufacturing facilities with the closure of the larger facility and the loss of 200 jobs or approximately 7 percent of the Company’s worldwide headcount. Read more >>

Ultra Clean Technology in turnkey probe station manufacturing deal with Cascade Microtech

24 October 2008
Cascade Microtech's M150 probe stationCritical components and sub-systems specialist, Ultra Clean Technology, is moving up the value chain with a deal that will see the company take over the building of Cascade Microtech's M150 probe station product line. Production of the M150 is expected to begin in the fourth quarter of 2008 with volume production planned for the first quarter of 2009. The 150mm stations will be supplemented with 200mm station construction at a future date, the company said. Read more >>

Product Briefings

New Product: Oerlikon Leybold’s TURBOVAC SL pumps made for harsh environments

18 September 2008
Oerlikon Leybold’s TURBOVAC SL pumps Product Briefing Outline: Oerlikon Leybold Vacuum has introduced TURBOVAC SL, a line of high-reliability mechanical turbomolecular vacuum pumps for semiconductor manufacturing, analytical instrumentation, R&D and other demanding applications. The pumps feature extreme durability, ease of use and several innovations that simplify and improve incorporation into customer equipment. Read more >>

New Product: NEHP offers solutions for rapid low-cost tool hook-up projects

08 July 2008
NEHPProduct Briefing Outline: NEHP has utilized return on investment modeling developed in-house to better assess the cost of installation of major tools using a modular approach versus traditional stick-built methods and the timeline for tool installation from Dock to Signoff.  According to NEHP, its 3D or 2D P&ID pre-packaged modules have reduced costs by an estimated 14 – 49% (based on degree of modularity and tool complexity) and schedules by as much as 30 to 35% from start to finish (see Figure 1). Complete tool pre-facilitization techniques and solutions prior to tool arrival on the fab floor have been developed, resulting in significant cost savings that have been modeled by NEHP. Read more >>

New Product: Thin film deposition controller from INFICON prevents mode hop

30 May 2008
InficonProduct Briefing Outline: INFICON has introduced the XTC/3 a thin film deposition controller for single and multiple-layer processes. The XTC/3 utilizes INFICON's patented ModeLock technology that provides mode hop prevention while in operation. The controller is designed to provide accurate control of deposition rate and thickness, for virtually any number of layers, while it is easy to install and offers high reliability, according to the company. Read more >>

White Papers

Special valve configurations and evolutions for new ALD precursors

01 March 2008
John Baxter, Swagelok Company, Solon, OH, USA Read more >>

The effect of HCl permeaton through PFA on expected component life

01 March 2008
Don Grant & Debra Carrieri, CT Associated, Inc., Eden Prairie, Minnesota, USA Read more >>

Qualification of components for high purity water, chemical and slurry systems

01 December 2007 | Comments (2)
Gary Van Schooneveld, CT Associates, Inc., Minnesota, USA Read more >>