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New Product: Accent Optical’s new Filmz FTIR offers wide range of plug & play applications. |
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Nov 08, 2005 at 04:05 PM |
Product Briefing
Outline: Accent Optical Technologies has expanded its FTIR application suite
with the introduction of "Filmz". It employs new proprietary intelligent
algorithms to extract the maximum amount of information from the measured IR
spectrum, according to the company. The company claims that by directly
integrating an interpretive engine within the algorithms dramatically improves
the ease of use to the point whereby operators can generate effective recipes.
Problem: In
previous applications to work effectively, it was required to have the recipe
definition of 16 parameters, which inherently presumed a detailed technical
knowledge of the material and FTIR operational variables. Filmz now delivers
the same results with only three general variables inputted, according to the
company.
Solution: In
addition to improved ease of use, Filmz(TM) is more robust in its
applicability. It requires no calibration and a single recipe can reliably
determine thickness over several orders of magnitude with nanometer level
precision. In the case of semiconductive epitaxial films, Filmz(TM) is immune
to large variations in dopant concentration, unlike most other applications. Very short learning curve means an
operator is ready to use solution right out of the box, while providing fast
feed-back or feed-forward to reduce cycle time.
Applications: Filmz
is not just for standard epi; it is also applicable to MEMS devices (substrates
and layers), SiC wafers and devices and other compound materials. Also for photoresist and dielectric films including
some extraordinarily thick films, as well as verifying reprocessed monitor wafers.
Platform: Unique algorithms developed
by Accent. Works across the Accent suite of configurations Accent's QS1200,
QS2200 and QS3300 model series. Compatible with open cassette, SMIF, and foup
configurations.
Availability: November
2005 onwards.
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Product Briefings 
