F. Somboli & G. Fazio, ST Microelectronics

ABSTRACT

The pressure rate of rise is a standard method to test for leaks in vacuum systems, and to control/calibrate MFCs (mass flow controller). Unfortunately, the calibration of ROR sensors is often neglected. In this way, there is the risk to perform controls using equipment that could be worse than the tested system.  In this paper we describe a method and a simple device to calibrate, quickly and accurately, the pressure ROR system. The suggested device can help engineers to avoid the above-described problem.