R. Singh, A. Venkateshan, M. Fakhruddin & K. F. Poole, Center for Silicon Nanoelectronics, Clemson University and N. Balakrishnan & L. D. Fredendall, Dept. of Management, Clemson University

ABSTRACT

In this paper we have described the importance of single wafer processing (SWP) in semiconductor industry.. As compared to batch processing, reduced cycle time, reduced processing temperature, reduced process variation and reduced defect densities are some of the attractive features of SWP.