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Tool Orders: AMD repeats implant order with Axcelis |
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Sep 28, 2005 at 07:50 PM |
The system will
be shipped during September to AMD's Fab 36, a 300mm fab in Dresden, Germany.
The implanter will be used for volume production of advanced transistors using
65nm and 45nm device technologies. AMD was the first company to purchase the
new single wafer platform, according to Axcelis.
"The
relationship between AMD and Axcelis continues to strengthen as we achieve
major performance milestones with our initial tool placement," said Mary
Puma, chairman and CEO of Axcelis. "In particular, the Optima MD provides
unmatched precision in the areas of dopant placement and angle control - two
key advantages when producing advanced devices. Moreover, the platform's broad
energy range delivers the flexibility and capital efficiency AMD needs to
achieve its productivity goals."
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