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A Japanese 300mm logic fab has placed a multi-million dollar, multi-tool order for Therma-Wave, Inc's Opti-Probe 7341XP thin-film and critical dimension metrology systems. The tools will be used to support front end as well as back end 300mm logic device manufacturing processes at the 90nm node as part of a transition to copper based production.

"The Opti-ProbeXP system provides this customer with a thin-film and CD metrology solution designed specifically to address the need for increased precision in measuring ever-thinner films, and more complex materials, on smaller integrated circuit devices. Our Opti-ProbeXP addresses these challenges while facilitating high productivity throughput and a low total cost of ownership. This latest order from Japan reflects our ability to deliver advanced metrology applications to meet our customers' stringent requirements for precision and repeatability," commented Boris Lipkin, president and chief executive officer of Therma-Wave.