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Faster CD control for 3D libraries |
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Sep 27, 2005 at 09:45 PM |
 Product Briefing Outline: Timbre Technologies, has released their next
generation Optical Digital Profilometry (ODP) metrology product,
TeraGen 2.5. The new product offers the fastest library generation time
combined with exceptional precision, according to the company.
Problem: Using TeraGen 2.5's Turbo technology, library
generation time is reduced by a factor of five times or more, and even
complex Turbo libraries can be typically generated in less than one
hour. In addition, parameter volume is greatly expanded, resolution is
improved, and library file size is reduced for easy management. Turbo
libraries provide a significant reduction in timeto-results, continuing
the trend of ODP libraries as the fastest and easiest precision
metrology process, ideal for production environments.
Solution: TeraGen 2.5 supports Timbre's Smart Spectra technology,
which assures the highest modeling accuracy and productivity, and
brings practicality to the generation of even the toughest 3D libraries
for monitoring processes, such as contact and via. Furthermore, TeraGen
2.5's user interface has greater flexibility and improved productivity,
so that users can quickly implement new applications into production
with high confidence in the integrity of metrology performance.
Applications: Optical Digital Profilometry usies broadband light
to provide non-destructive, high-speed, cross-sectional profiles,
including user-selected CDs, profile parameters, and thickness
measurements for a wide range of applications.
Platform: ODP is based on a new computing algorithm that performs all the required analyses without approximation.
Availability: July 2005 onwards.
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Product Briefings 
