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Pneumatically actuated 3-way diaphragm valve |
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Sep 28, 2005 at 12:24 AM |
 Product Briefing Outline: Swagelok Semiconductor
Services Company has launched the pneumatically actuated DRP series
3-way diaphragm valve, expanding its ultrahigh-purity fluoropolymer
diaphragm valve offering. Meeting SEMI Standard F57-0301 for
ultrahigh-purity polymer system components, the new valve has many
applications,
including aggressive CMP slurry, acid, chemical, and ultrahigh-purity
DI water delivery systems. All wetted parts are made from DuPont(R)
Teflon(R) modified PTFE and PFA.
Problem: New wet processes require greater levels of
purity with improved design to reduce particle trapping and degradation
in harsh environments. Longer lifecycles
are required to reduce CoO and improve tool up-time.
Solution: Designed for use in semiconductor industry
ultrahigh-purity chemical distribution systems, the unique patented
design features of the DRP series valve minimize entrapment areas and
enhance diaphragm performance. A hemispherical valve cavity and
patented diaphragm shape enable rapid and thorough cleaning of all
wetted surfaces. The shape of the modified PTFE diaphragm minimizes
stress during cycling to promote
durability, seal integrity, and long cycle life. In addition, the web
thickness of the diaphragm has been maximized to reduce the potential
for acid permeation.
Applications: CMP slurry, acid, chemical, and ultrahighpurity DI water delivery systems.
Platform:
DRP series 3-way diaphragm valves are available with polypropylene
pneumatic actuators. Available end connections include ISO, NPT, fine
thread flare, and Nippon Pillar(R) Super 300. This Swagelok DRP
technology also is available in customized manifold configurations.
Availability: July 2005 onwards.
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Product Briefings 
