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Compact design less than half the size of traditional vacuum gauges |
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Sep 27, 2005 at 11:21 PM |
 Product Briefing Outline: Mykrolis Corporation has announced the release
of the XacTorr CMC series of compact capacitance diaphragm gauges (CDGs) for
vacuum processes that provide accurate total pressure measurement independent of gas composition.
Problem: The XacTorr CMC Series is a high performance, cost
effective solution for unheated gauge applications. Its compact layout,
unique design and high accuracy make the XacTorr CMC an alternative
gauge to larger, premium unheated gauges and facilitates easy
installation and retrofit replacement.
Solution: The XacTorr CMC series incorporates a unique
combination of technologies that include a thermally balanced
mechanical structure, physical strain isolation and sensor shielding
for optimal short-term repeatability and long- term stability. In
addition, the XacTorr CMC offers accuracy to 0.25% of reading for more
demanding applications.
Applications: Vacuum processess.
Platform: The XacTorr CMC Series is available in fullscale
ranges from 10 Torr to 1,000 Torr and is a perfect upgrade for smaller
form-factor CDGs and an economical alternative to full sized unheated
CDGs.
Availability: July 2005 onwards.
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Product Briefings 
