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RGA’s get web health check |
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Sep 27, 2005 at 11:04 PM |
 Product Briefing Outline: MKS Instruments, has launched
‘TOOLweb RGA,' a sensor automation platform for RGA control and
communication. TOOLweb RGA monitors
process integrity and tool performance in real-time, identifies process
excursions, and generates alarms and targeted e-mail messages. It
incorporates sensor-level FDC as well as data reporting and searching
capabilities, and provides comparisons of wafer-to-wafer,
chamberto-chamber and tool-to-tool data.
Problem: Time to market, time to yield and the cost of
300mm wafer processing requires real-time monitoring of tools operating
conditions to maintain the correct
process parameters. Excursions previously effecting yield would not be
known until after electrical test or random inspection. Improvements in
yield would take
considerable time and delay IC product role-outs.
Solution: TOOLweb RGA is network centric, with Ethernet
connectivity down to the sensor level. Sensors monitor process gas
pressure, composition and stability
as well as contaminant levels throughout the process, generating alarms
(including e-mails to specific user groups) and stopping the tool if
required. This minimizes
the cost and yield impact of tool downtime, according to the company.
By speeding PM and other downtime recoveries, TOOLweb RGA maximizes
tool uptime and
provides a highly cost-effective means of maintaining and troubleshooting vacuum tools.
Applications: RGA control and communication.
Platform: TOOLweb RGA functions as a data source for MKS'
TOOLweb connectivity platform or the factory host via TOOLweb tool-side
protocol, SECS/GEM or custom
interfaces. It offers browser access to data reporting, data searching
and univariate FDC modeling capabilities. TOOLweb RGA components
include a process-specific
RGA, a tool connectivity component such as the MKS Blue Box or access
to the tool's secondary SECS port, and MKS' Process Eye Professional
RGA control platform running recipe modules (including routines for
sensor configuration, calibration, chamber-state tracking and
real-time, dynamic alarms).
Availability: July 2005 onwards.
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Product Briefings 
