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Reducing the HPM Risk: Pressure-actuated Gas Delivery
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ABSTRACT
Critical information on the environmental, health and safety benefits offered by a new technology for reducing the associated risks of storing and delivering high pressure hazardous process materials [HPMs] follows. The Vacuum Actuated Cylinder [VAC™ gas source] provides the benefits of sub-atmospheric pressure actuation and reduced pressure delivery to a wide array of etch and CVD applications used in semiconductor and other industries.
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