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Internally heated pressure transducer for CVD & etch |
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Sep 27, 2005 at 11:00 PM |
 Product Briefing Outline: Setra Systems, has
introduced the 700 Series heated, absolute pressure transducer. The new
700 series incorporates all welded, ‘Inconel' variable capacitance
sensors, which are characterized by wide dynamic range, high accuracy
and overpressure capability. The ‘Inconel' variable capacitance sensor
also provides a direct total pressure measurement that is independent
of gas composition.
Problem: The 700 Series models are ‘pin for pin' compatible
with, and provide a low cost alternative to competitive capacitance
manometer (CDG) brands. Their inherent stability, repeatability, and
corrosion resistance makes the 700 series an suitable for low pressure
semiconductor processing including CVD and etch.
Solution: The 700 Series are internally heated and precisely
controlled at one of three temperatures: Model 764 @45ºC, Model 769
@100ºC, and Model 774 @123ºC. The heated sensors provide superior
immunity from ambient temperature changes with typical zero stability
of better than 0.002% FS/ºC. Additionally, heating the sensor prevents
process by-products from condensing inside, therefore, preventing
particulates from depositing on the diaphragm and resulting in
calibration errors, or worse, making their way back to the process
chamber and lowering yields.
Applications: CVD and etch.
Platform: Operable from a ±15 VDC power supply, the 700 Series
provides a 0 to 10 VDC output signal that is linear with pressure and
has a resolution of better than 1 part in 20,000. Full scale ranges
from 100 mTorr up to 1,000 torr are offered with accuracy of ± 0.15% of
Reading. The standard product is fitted with a 1/2" O.D. tube stub, and
a 15-pin D electrical connector and is fully CE compliant. A wide
variety of optional pressure fittings are also available.
Availability: July 2005 onwards.
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Product Briefings 
