Written by Takako Kimura, Kayo Momoda & Jun Sonobe, Air Liquide Labs., Yoshihiro Ueno, Air Liquide Japan, Jean-Marc Girard, Air Liquide Electronics, Corporate Division

ABSTRACT

This article deals with how to secure a safe and reliable F2 supply at semiconductor manufacturing sites in accordance with the local regulations and the unique circumstances. In order to overcome the drawbacks and concerns of F2 supply, a solution package based on the risk assessment and a material compatibility study is described. As a result a safe, reliable and high-purity F2 supply is available according to the needs of the end user whether by gas cabinet or by on-site generation system, as has been already demonstrated through a continual commercial operation.