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Fab-wide data analysis, storage and retrieval system for wafers |
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Sep 27, 2005 at 10:17 PM |
 Product Briefing Outline: ADE Corporation has
introduced the ‘FabVision' system, a real-time, comprehensive, fab-wide
data management system that continuously monitors, reports and
manages product quality information. Integration of FabVision has
shortened a customer's cycle times and increased process yields,
according to the company. Alerts on process excursions, daily reports
and selected data are generated and sent automatically worldwide to
better manage operations at
the fab, process or customer level.
Problem: FabVision allowes engineers to combine data from
multiple tool types for an enhanced view of each process step. With the
ease of data access and the
automatic alerts on all out-of-spec conditions, engineers can now
quickly analyze and resolve process problems, resulting in improved
cost of ownership and higher
yields. As wafer makers and reclaim houses increase capacity and add
tools, FabVision reduces the complexity of reviewing thousands of
wafers a day for product yield
management.
Solution: The FabVision system includes a fully integrated master
server, tool interconnections, workstations and software that enables
the user to easily
collect, analyze, store and retrieve critical metrology and inspection
data from a wide range of measurement and inspection tools distributed
throughout the production
process without interruption or throughput reduction. With FabVision,
wafer manufacturers and wafer reclaim operations have the ability to
retain the metrology and inspection data for millions of wafers and to
retrieve critical information about those wafers in seconds. The
integrated database enables a quick analysis and
response to customers' inquiries about product history and quality.
With real-time production information, the system provides management,
engineering and
operations with the capability to proactively detect process excursions that can lead to yield loss.
Applications: Wafer manufacturers and wafer reclaim houses.
Platform: The FabVision server collects and combines data from
ADE's ‘WaferXam' defect detection and classification tool and
‘WaferSight' optical flatness system, ‘AFS' Advanced Flatness System,
‘AWIS' Advanced Wafer Inspection System, ‘FIT' Film Inspection Tool,
‘NanoMapper' surface topography system, ‘AcuMap' film thickness mapper,
‘WaferCheck' ‘UltraGage' and ‘UltraScan‘ dimensional sorting systems
and CR8X particle inspection products.
Availability: July 2005 onwards.
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Product Briefings 
