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Tool Orders: Infineon buys Mattson’s eHighlands for 300mm low k strip |
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Sep 27, 2005 at 05:51 PM |
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Mattson
Technology, Inc. has announced that it has shipped its Aspen III eHighlands to
a leading European DRAM manufacturer, strongly believed to be Infineon. Mattson
has been working with this chipmaker to qualify the eHighlands for
back-end-of-line (BEOL) low-k strip and front-end-of-line (FEOL) oxide-removal
applications for the production of advanced sub-90 nm DRAM devices.
The company
claims the selection was made after the DRAM manufacturer ran benchmarking
tests with a competitor's tool offering.
"After
competitive head-to-head evaluations, this leading DRAM manufacturer selected
the Aspen III eHighlands as the tool of record for its 300 mm fab, validating
the technical strength, processing flexibility and extendibility of our
high-productivity tool for the most challenging BEOL copper/low-k and FEOL
strip applications," said Stephen T. Lanza, Mattson Technology's Global
Business Operations vice president & general manager, Europe and North
America.
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