Michael W. Wismer & Richard E.Woodling, USFilter, Milpitas, CA, USA

ABSTRACT

The Copper Select™ process is being used at many semiconductor Fabs around the world to successfull treat copper-bearing CMP wastewaters. The patented process removes copper from wastewater without removing the CMP slurry particles. Studies have shown the process to be very successful with most commercially available copper slurry formulations.