N. Van Hoornick, K. Van den Broeck, J. Van Hoeymissen & M. Heyns, IMEC, Heverlee, Belgium, W. Riedel & C. Braun, M+W Zander, Stuttgart, Germany

ABSTRACT

This article describes a life-cycle cost model that takes the complex interaction between activities in IC facilities within a fab into account. In addition, the model provides all necessary outputs for environmental impact modelling such as gaseous emissions, concentrations of wastewater compounds, etc.