R. Sturm & K. Reddig, Fraunhofer Institute Manufacturing Engineering and Automation Stuttgart, Germany. D. Glüer, Advanced Micro Devices Saxony LLC & Co. KG, Dresden, Germany

ABSTRACT

Planning and operating automated material handling systems (AMHS) for microelectronics and semiconductor manufacturing have become increasingly important for modern high-volume production lines. As a service system for the manufacturing process, reliable material supply to the process equipment is mandatory, and the scope of operating an AMHS is on the prompt.