Martin Bijker, OTB-Solar, Eindhoven, Netherlands, Chistopher M. Rippl & Frank Klabunde, Pfeiffer Vacuum GmbH, Asslar, Germany

ABSTRACT

OTB-Solar, a manufacturer of solar cell coating systems has developed a new type of SiN anti-reflection coating system DEPx (see Figure 1).In this system three load-lockchambers are necessary. In the past it was necessary to equip these loadlock chambers with a combination of a turbopump and a backing pump to reach the specifications. This led to a high installation effort with three valves, a bypass for the turbopump and complex system software to control this vacuum system.