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24th Edition: The current state of the robotics industry |
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Dec 11, 2004 at 01:43 PM |
John West, VLSI Research Europe, UK
ABSTRACT
The handling of substrates within process tools is not as simple as it first appears. The fact that it looks as easy is it does is evidence of the success that robotic subsystems suppliers have had in overcoming many of the technological challenges the industry currently faces. In particular, the move to larger substrates and smaller feature sizes has resulted in the development of robots that are more powerful, more reliable, and less likely to generate particles.
24th Edition: The current state of the robotics industry
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Critical Components 
