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Home arrow Materials & Gases arrow Articles arrow Edition 27 arrow 27th Edition: Manufacturable strained silicon technology
27th Edition: Manufacturable strained silicon technology Print E-mail
Aug 21, 2005 at 12:29 PM

P.R. Chidambaram, Texas Instruments, Richardson, TX, USA

ABSTRACT

In the last year most semiconductor manufacturers have announced the use of some form of strain enhancement in their production technology [1-4]. Strain is the most popular means of realizing the required node-on-node transistor performance improvements in recent times. This article will review the most popular and manufacturable strained silicon technologies. 

27th Edition: Manufacturable strained silicon technology
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