At the 2nd International Symposium on Immersion Lithography, which began today in Belgium, Mitsui Chemicals, Inc. has revealed that SELETE in Japan has been evaluating its higher refractive index liquid "Delphi" for possible use at the 32nm node.

Mitsui's "flavored" water is a cyclic hydrocarbon compound with a refractive index of 1.63. Mitsui is a new entrant to this potential new market and has stated that they plan to increase business in the specialty materials market.

At SPIE early this year, JSR Micro, Corning and Dupont had highlighted work they where all doing with high index fluids. JSR Micro's "HIL 001" offering has a claimed index of 1.64.