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Tool Order: Akrion receives several batch immersion system orders
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Akrion has booked orders worth over $6 million recently from both
European and U.S.-based IC manufacturers, the company said. The orders
include a GAMA Series combination oxide etch/photo resist strip system
for a US manufacturer of power management devices and a GAMA pre-gate
clean system for a US manufacturer of analog and mixed-signal products.
Akrion also received two refurbished tool orders for its AWP wet
stations.