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New Product: SAFC Hitech’s OM700 enables efficient organometallic precursor delivery
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Product Briefing Outline: SAFC Hitech has introduced
the OM700, a bubbler that offers a cost-efficient migration path to
controlled precursor delivery for larger lot sizes, enabling a
reduction in process downtime, combined with increased safety controls.
Problem: As the demand for higher throughput and
process efficiency grows, more efficient methods for precursor delivery
will be required. Reliable, flexible, highly controllable dosimetry of
organometallic precursors is key to production environments where
downtime is prohibitively expensive. The frequency of container change
out can be minimised by moving to larger batch sizes but maintaining
temperature control becomes difficult using conventional heater baths.
Also, bubbler size is limited to that of the installed bath.
Solution: The
OM700 is designed to provide a reliable and highly controllable
dosimetry of highly sensitive organometallic precursors, such as
trimethylgallium (TMG), trimethylaluminum (TMA) and triethylgallium
(TEG), in production environments where downtime is prohibitively
expensive. The large capacity, 13 kg precursor containers reduce the
frequency of container change outs, thereby minimizing downtime and
bubbler manipulation safety hazards by enabling larger batch sizes. The
combination of advantages associated with the OM700 in a production
environment results in reduced operational costs without compromised
performance. In existing large bubbler technology, maintaining
temperature control is often difficult because they use conventional
heater baths. Another limitation of current bubbler technology is that
the size of the bubbler itself is restricted to that of the installed
bath. The OM700 overcomes these issues with an independent heating
jacket and thermal control system that enable an increased volume to
accommodate over nine liters of metal alkyl, while still maintaining
strict temperature and operational controls.
Applications: Organometallic precursors, such as trimethylgallium (TMG),
trimethylaluminum (TMA) and triethylgallium (TEG).
Platform:
The OM700's flux stability covers a range of operating temperatures
from -10 degrees C to +30 degrees C, and ensures that all processes can
be run at peak efficiency.
Availability: June 2008 onwards.