Product Briefing Outline: Hach Ultra has introduced the MET ONE 6000 Series Remote Airborne Particle Counters, which offer accurate and reliable continuous particle monitoring. With a sensitivity range of 0.2 to 5.0µm at 0.1 cfm flow rate and 0.5 to 10µm at 1.0 cfm flow rate, the MET ONE 6000 series is designed to meet the specific needs of cleanroom operations within the semiconductor, hard disk drive and flat panel display industries. 

Problem: Although minienvironments are commonly employed in fabs, there remains the need for constant particle monitoring due to continued feature size shrinks. The challenges of new processes and finer geometries, for example, require sampling rates of 1cfm at the 65nm node. The need for reliability, ease of maintenance and low CoO while meeting new cleanroom requirements is ever present.

Solution: The MET ONE 6000 offers diagnostic features that provide reduced troubleshooting and downtime-related costs. Built with ‘Long Life Laser’ technology, the Met One 6000 offers improved product quality, reliability and performance for remote particle counting. With communication options such as RS485 Serial Modbus, Ethernet, Analog, Pulse and RS232, the MET ONE 6015 is easy to integrate with any facility monitoring system and enables future upgrading as the communication needs of a facility change. These communication choices and an array of mechanical installation options also reduce downtime related to instrument removal and re-installation during routine calibration and preventative maintenance work.

Applications: All cleanroom types.

Platform: Available in a sensitivity range of 0.2 to 10µ m, and flow rates of 2.83 LPM or
28.3 LPM. ‘Long Life Laser’ diode reduces the need for replacement parts and the overall cost of ownership. Instrument can be diagnosed for flow, sensor, communication failures, and count alarm or count alert through built-in or external light stack. These additional diagnostic features provide faster troubleshooting and reduced downtime.

Availability: April 2008 onwards.