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Elpida’s E300-Fab 2 orders Zenith abatement technology from BOC Edwards |
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Sep 14, 2005 at 05:46 PM |
In a move to
support Elpida's commitment to environmental manufacturing, BOC Edwards, will supply
Elpida's E300-Fab 2 (300mm) with multiple Zenith CVD integrated vacuum and
abatement systems.
The Zenith
Series provides fully-integrated abatement and vacuum pump solutions for
treatment of toxic process exhaust gases and precursors in addition to the
handling of high flows of hydrogen. Elpida Memory, Inc. will install the
systems in their new 300 mm wafer fabrication facility, E300-Fab 2, scheduled
for startup in December 2005. These systems follow an earlier series of Zenith
systems supplied for the customer's initial install phase at this site.
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