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ASM International to R.I.P. RTP
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ASM International has said that it will not be a player in the rapid
thermal processing (RTP) market from 2009 onwards. The equipment
company hopes to transfer its ‘Levitor’ RTP tool and small customer
installed base to a third party by the end of the year.
“Although we have always believed in the exceptional breakthrough
technology of our Levitor RTP systems, as have several leading-edge
customers, we have decided to really focus on ASMI's core strengths in
the front end growth areas of ALD technology (both thermal and
plasma-enhanced, in batch and single wafer), PE-CVD, single wafer
Epitaxy, and thermal/LPCVD batch processing,” said Chuck del Prado,
President and Chief Executive Officer of ASM International.
The
unconventional Levitor technology had been under development for
approximately 10 years and only gained a few publicly announced
customers since 2006. The product line had never been profitable for
the company.