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Tool Order: Wuhan Xinxin Semiconductor to use Mattson’s Suprema strip system
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Wuhan Xinxin Semiconductor Manufacturing Corporation (WXIC) has
purchased a Suprema photoresist strip system from Mattson Technology
for its first 300mm fab in Wuhan, China, operated by SMIC. The tool has
already been shipped and marks the 100th Suprema tool shipment since
introduced two years ago.
"We selected the Suprema system due to its extremely high productivity
with superior process performance, low COO and reliability,” noted John
Liu, Vice President of the Wuhan project at SMIC. “As the first 300mm
fab in central China delivering advanced technologies, we seek partners
who can contribute to improved efficiencies, economics and
performance. Mattson Technology is a valued partner with the requisite
dedication to improvements in their customers' productivity."
“Wuhan
Xinxin Semiconductor has selected the Suprema system including for
advanced High Dose Implant Strip or HDIS applications - demonstrating
their confidence in the system's ability and maturity to deliver the
process expandability that can help speed critical time-to-market for
Wuhan Xinxin Semiconductor's current and future products,” said Neal
Holmlund, Sr. Vice President and General Manager of Mattson
Technology's Surface Cleaning Group.
According to Fabtech’s own
'300mm Activity Report,' WXIC is expected to ramp NAND flash production
as well as logic IC production at the 300mm fab later in 2008,
incorporating 90 through 65nm node processes.